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Specifications
| Publisher | IntechOpen |
| ISBN 13 | 9789535110859 |
| ISBN 10 | 9789535110859 |
| Book Description | MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the- |
| Language | English |
| Author | Kenichi Takahata |
| Number of Pages | 236 pages |
Advances in Micro/Nano Electromechanical Systems a
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