Specifications
| Publisher | IntechOpen |
| ISBN 13 | 9789533079066 |
| ISBN 10 | 9789533079066 |
| Book Description | Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in t |
| Language | English |
| Author | Mojtaba Kahrizi |
| Number of Pages | 314 pages |
Micromachining Techniques for Fabrication of Micro
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