Nanoparticle Engineering for Chemical-Mechanical Planarization
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Highlights
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Specifications
| Publisher | Taylor & Francis |
| ISBN 13 | 9781420059113 |
| Author | Paik, UngyuPark, Jea-Gun |
| Book Format | Paperback |
| Language | English |
| Book Description | Nanoparticle Engineering for Chemical-Mechanical Planarization BY Paik, UngyuPark, Jea-Gun - PublisherTaylor & Francis - Copyright: 2009 - ISBN: 9781420059113 |
| Edition Number | 1 |
| Publication Date | 2009 |
Nanoparticle Engineering for Chemical-Mechanical Planarization
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