Specifications
| Publisher | Woodhead Publishing |
| ISBN 13 | 9780081002506 |
| ISBN 10 | 9780081002506 |
| Book Description | The Directed Self-Assembly (Dsa) Method Of Patterning For Microelectronics Uses Polymer Phase-Separation To Generate Features Of Less Than 20Nm, With The Positions Of Self-Assembling Materials Externally Guided Into The Desired Pattern. Directed Self-Assembly Of Block Co-Polymers For Nano-Manufacturing Reviews The Design, Production, Applications And Future Developments Needed To Facilitate The Widescale Adoption Of This Promising Technology. Beginning With A Solid Overview Of The Physics And Chemistry Of Block Copolymer (Bcp) Materials, Part 1 Covers The Synthesis Of New Materials And New Processing Methods For Dsa. Part 2 Then Goes On To Outline The Key Modelling And Characterization Principles Of Dsa, Reviewing Templates And Patterning Using Topographical And Chemically Modified Surfaces, Line Edge Roughness And Dimensional Control, X-Ray Scattering For Characterization, And Nanoscale Driven Assembly. Finally, Part 3 Discusses Application Areas And Related Issues For Dsa In Nano-Manufacturing, Including For Basic Logic Circuit Design, The Inverse Dsa Problem, Design Decomposition And The Modelling And Analysis Of Large Scale, Template Self-Assembly Manufacturing Techniques. |
| What's In The Box | Book |
| Language | English |
| Author | Roel Gronheid, Paul Nealey |
| Publication Date | 2017 |
| Number of Pages | 328 |
Directed Self-Assembly Of Block Co-Polymers For Nano-Manufacturing hardcover english - 2017
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