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Specifications
| Publisher | Artech House |
| ISBN 13 | 9781607839774 |
| ISBN 10 | 1607839776 |
| Book Subtitle | Concept To Key Applications |
| Book Description | This groundbreaking book provides you with a comprehensive understanding of FBAR (thin film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary metal oxide semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. |
| About the Author | This groundbreaking book provides a comprehensive understanding of FBAR (thin film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, professionals find extensive coverage of these devices at both the technology and application levels. This practical reference offers guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard technologies, and their application to sensing and RF systems. Moreover, this one stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping practitioners to choose the right approaches for their projects. RF and microwave, telecommunications, material and process, and MEMS / NEMS engineers and scientists. Humberto Campanella is an associate professor at the Universitat Autonoma de Barcelona (UAB) and serves on the graduate research staff at the National Center for Microelectronics in Barcelona. I have a Ph.D. in both electronics engineering and microelectronics and automated systems from Universitat Autonoma de Barcelona and the Universite Montpellier II in France, respectively. |
| Language | English |
| Author | Humberto Campanella |
| Publication Date | 31-Mar-09 |
| Number of Pages | 390 |
Acoustic Wave And Electromechanical Resonators hardcover english - 31-Mar-09
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